Glass waveguides obtained by sputtering of a photosensitive glass target

Daniel Milanese; Monica Ferraris; C. Fabrizio Pirri

doi:10.1117/12.525857

19 November 2003 Glass waveguides obtained by sputtering of a photosensitive glass target

Daniel Milanese, Monica Ferraris, C. Fabrizio Pirri

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.525857
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

RF sputtering of an amorphous photosensitive target at different deposition temperature and time conditions was performed in order to obtain thin film planar waveguides for telecom applications. Silica glass was used as a substrate, the chosen target was for the first time a photosensitive SiO₂:GeO₂:Na₂O glass and the process was carried out under Ar atmosphere. The so-obtained thin films were tested in terms of composition, microstructure and optical properties. A planar waveguide was obtained at room temperature, with a refractive index of 1.5707 at a measurement wavelength of 1553 nm, with respect to a refractive index value of the substrate of 1.45.

Citation Download Citation

Daniel Milanese, Monica Ferraris, and C. Fabrizio Pirri "Glass waveguides obtained by sputtering of a photosensitive glass target", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.525857

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