Paper
29 July 2002 Applications of x-ray interferometry in metrology and phase-contrast imaging
Giovanni Mana
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Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484565
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation
Abstract
X-ray interferometry makes important contributions in several fields, such as the improvement of a set of self-consistent fundamental physical constants, the linking between macroscopic and microscopic length scales, the metrology of atomicscale displacements, and the x-ray topography and tomography. This paper reviews x-ray interferomery by describing the principles of operation and the most important features of combined x-ray and optical interferometry, with emphasis on the scientific and technological challenges still deserving particular attention.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Giovanni Mana "Applications of x-ray interferometry in metrology and phase-contrast imaging", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484565
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Cited by 3 scholarly publications.
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KEYWORDS
Interferometers

X-rays

Crystals

X-ray optics

Interferometry

Silicon

Metrology

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