Laser ellipsometry: precise method of surface measurement

S. V. Rykhlitski; E. V. Spesivtsev; V. A. Shvets

doi:10.1117/12.484455

29 July 2002 Laser ellipsometry: precise method of surface measurement

S. V. Rykhlitski, E. V. Spesivtsev, V. A. Shvets

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484455
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

Systematization of major fields of laser ellipsometry application is given and basic ways of its development are considered. A series of industrially oriented laser ellipsometers have been developed. These are a scanning high-spatial resolution microellipsometer and a high-time resolution in-situ ellipsometer. The partial accuracy chart of the laser ellipsometers and the issues of their metrological certification are described. The possibilities of laser ellipsometry are illustrated by experimental measurements performed on equipment designed.

Citation Download Citation

S. V. Rykhlitski, E. V. Spesivtsev, and V. A. Shvets "Laser ellipsometry: precise method of surface measurement", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484455

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available