Equivalent circuit macromodel for a beam-structure electromechanical system in F-I analogy

Hua Rong; Qing-An Huang; Weihua Li

doi:10.1117/12.483182

10 September 2002 Equivalent circuit macromodel for a beam-structure electromechanical system in F-I analogy

Hua Rong, Qing-An Huang, Weihua Li

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483182
Event: Photonics Asia, 2002, Shanghai, China

Abstract

System-level simulation is an important phase for shortening design cycle and reducing design costs of MEMS devices, while the key to do this is to create macromodels for the MEMS devices. An equivalent circuit macromodel for beam-structure electromechanical systems is presented in force-current (F-I) analogy. It is appropriate for small-signal time and frequency domain analysis. Comparing with the existed macormodel created by force-voltage (F-V) analogy, the F-I analogy macromodel has the following advantage: the topology of the electric network of a F-I analogy macromodel is the same one as its original mechanical network. So it is very convenient to create an equivalent circuit macromedel for a complicated MEMS in F-I analogy. Simulating results show that the F-I analogy macromodel has high accuracy.

Citation Download Citation

Hua Rong, Qing-An Huang, and Weihua Li "Equivalent circuit macromodel for a beam-structure electromechanical system in F-I analogy", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483182

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