Excimer laser micromachining technology in biochip

Tao Chen; Jiming Chen; Yu Zhang; Bohua Ying; Tao Jing; Tiechuan Zuo

doi:10.1117/12.483155

10 September 2002 Excimer laser micromachining technology in biochip

Tao Chen, Jiming Chen, Yu Zhang, Bohua Ying, Tao Jing, Tiechuan Zuo

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483155
Event: Photonics Asia, 2002, Shanghai, China

Abstract

This paper briefly introduce our work on new biochip manufacuring utilizing excimer laser micromachining. The experiment results shows, that this technology have potentials in actual microstructure forming, processing way, manufacturing cost, efficiency, etc. We investigate the projection mask ablation on PMMA, and get the microgear sample. With the relative motion between the workpiece and the mask, the repeated excimer laser pulse will etch a 3D microstructures, or even form several different profiles on the straight line microgroove. This will be very useful for the microchannel formation on Biochip.

Citation Download Citation

Tao Chen, Jiming Chen, Yu Zhang, Bohua Ying, Tao Jing, and Tiechuan Zuo "Excimer laser micromachining technology in biochip", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483155

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