Laser fabrication technology for micromachines

Jiming Chen; Tao Chen; Xubao Wang; Tiechuan Zuo

doi:10.1117/12.483154

10 September 2002 Laser fabrication technology for micromachines

Jiming Chen, Tao Chen, Xubao Wang, Tiechuan Zuo

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483154
Event: Photonics Asia, 2002, Shanghai, China

Abstract

The laser micro-fabrication technology for micromachine is a noticeable research direction in micro-machine manufacture. In this paper several laser micro-fabrication technologies have been introduced. They are laser mask project lithograph, focus laser beam etching, selective laser sintering rapid fabrication and laser direct deposited fused powder. Authors also introduce the micro gears made with excimer laser mask exposure lithograph in PMMA and the micro Chinese character which is as small as a tip of match made with powder laser sintering technology. Furthermore authors propose another way to make micro-part which use fiber laser or disk laser combined with nano powder.

Citation Download Citation

Jiming Chen, Tao Chen, Xubao Wang, and Tiechuan Zuo "Laser fabrication technology for micromachines", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483154

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