Fabrication and testing of nanomechanical <100> silicon beam structures using a scanning probe system

Kumar R. Virwani; Ajay P. Malshe; W. F. Schmidt; Dinesh K. Sood

doi:10.1117/12.484272

13 November 2002 Fabrication and testing of nanomechanical <100> silicon beam structures using a scanning probe system

Kumar R. Virwani, Ajay P. Malshe, W. F. Schmidt, Dinesh K. Sood

Proceedings Volume 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems; (2002) https://doi.org/10.1117/12.484272
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

Knowledge of the mechanical behavior of strategically important materials such as silicon at nano scale is the key for building next generation devices. In this paper, we investigate the Young’s Modulus of nanomechanical beams [1-8 mm long, 200-400 nm wide, and 193 & 255 nm in thickness] fabricated from silicon-on-insulator (SOI) wafers. The beams of different dimensions were defined in PMMA resist using e-beam lithography. A layer of chrome deposited using lift-off technique, acted as an etch-mask for silicon to fabricate the beams by using RIE. The samples were dipped in BOE (Buffered Oxide Etch) to etch the oxide underneath and the beams were released using critical point drying. Using a Scanning Probe System, nanomechanical beams were bent using AFM silicon tapping mode probes. A controlled amount of force was applied by varying the voltage applied to the Z-axis piezoactuator. The values of beam deflection and the net force applied enabled us to plot the Load vs. Displacement graph for the bending of the nanomechanical beams. Using Euler - Bernoulli beam bending equations, the Young’s Modulus of the <100> Silicon beams was measured to be 174 GPa. This value agrees within 5% of the known value of bulk silicon Young’s modulus of 169GPa. Thus we conclude that the value of Young’s modulus of <100> Si beams does not change when the size is reduced to nanometer regime.

Citation Download Citation

Kumar R. Virwani, Ajay P. Malshe, W. F. Schmidt, and Dinesh K. Sood "Fabrication and testing of nanomechanical <100> silicon beam structures using a scanning probe system", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.484272

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available