Ti-Mo and Mo-W mixed oxides for gas sensing applications

Elisabetta Comini; Giorgio Sberveglieri; Kosmas Galatsis; Wojtek Wlodarski

doi:10.1117/12.476100

13 November 2002 Ti-Mo and Mo-W mixed oxides for gas sensing applications

Elisabetta Comini, Giorgio Sberveglieri, Kosmas Galatsis, Wojtek Wlodarski

Proceedings Volume 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems; (2002) https://doi.org/10.1117/12.476100
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

Molybdenum trioxide - tungsten trioxide (MoO₃-WO₃) and titanium oxide - molybdenum oxide (TiO₂-MoO₃) binary metal oxide thin films have been prepared by the sol-gel process and by PVD. The films were deposited using the spin coating technique and by sputtering onto alumina substrates with interdigital electrodes. MoO₃-WO₃ film morphology is composed of MoO₃ needle like grains and WO₃ spherical grains when annealed at 450°C. MoO₃-TiO₂ film morphology consists of a well-developed crystal structure for the sol-gel film and a porous morphology for the sputtered films when annealed at 800°C. The films exhibited selective gas sensing characteristics at an operating temperature of 300°C towards nitrogen dioxide (NO₂). The RF and SG fabricated MoO₃-TiO₂ possess different gas sensing properties attributed to the fabrication and resulting morphological difference of the thin films.

Citation Download Citation

Elisabetta Comini, Giorgio Sberveglieri, Kosmas Galatsis, and Wojtek Wlodarski "Ti-Mo and Mo-W mixed oxides for gas sensing applications", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.476100

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