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20 January 2003 Nodal model for continuous face sheet deformable mirrors
Alexandros P. Papavasiliou
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Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.477917
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
This work presents a nodal model for continuous face sheet deformable mirrors that can be solved quickly on a desktop computer. This network of simple cubic stiffening elements can more accurately simulate deflections resulting from complex loading conditions than a membrane model and is much easier to implement than a non-linear finite element model. The deflections predicted by the model are compared to expected behavior and to FEM results for a simple system. While restoring forces due to pre-stress and deformation-induced stress are fairly accurately modeled, resistance due to bending is only accurately modeled for specialized devices.
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Alexandros P. Papavasiliou "Nodal model for continuous face sheet deformable mirrors", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); https://doi.org/10.1117/12.477917
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KEYWORDS
Chemical elements
Finite element methods
Deformable mirrors
Resistance
Systems modeling
Actuators
Data modeling
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