Replication of micro-optical components by UV-molding process

Seok-min Kim; Dongmook Kim; Shinill Kang; Suhoo Ahn

doi:10.1117/12.472903

17 January 2003 Replication of micro optical components by UV-molding process

Seok-min Kim, Dongmook Kim, Shinill Kang, Suhoo Ahn

Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003) https://doi.org/10.1117/12.472903
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

An experimental method is presented to maximize the replication quality of UV-molded micro-optical components. It is important to maximize the replication quality, because one can obtain the replicated micro-optical components with desired properties by accurate control of the shape. In the present study, a simple technique to avoid micro-air bubbles was first suggested. The effects of the UV-curing dose and the compression pressure on the replication quality of UV-molded structure were examined experimentally. Finally, as a practical application of the process design method, micro-lens arrays with diameters between 8μm and 230μm were fabricated by the present method, and the replication quality and the optical properties of the replicated micro-lens were measured and analyzed.

Citation Download Citation

Seok-min Kim, Dongmook Kim, Shinill Kang, and Suhoo Ahn "Replication of micro optical components by UV-molding process", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); https://doi.org/10.1117/12.472903

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