Micro-deformation measurement using focused ion beam moire method

Huimin Xie; Biao Li; Robert E. Geer; Bai Xu; James Castracane; Fulong Dai

doi:10.1117/12.509789

29 April 2003 Micro-deformation measurement using focused ion beam moire method

Huimin Xie, Biao Li, Robert E. Geer, Bai Xu, James Castracane, Fulong Dai

Proceedings Volume 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002; (2003) https://doi.org/10.1117/12.509789
Event: Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002, 2002, Beijing, China

Abstract

A new focused ion beam (FIB) miore method is proposed to measure the in-plane deformation of object in a micrometer scale. The FIB moire is generated by the interference bewteen a prepared specimen grating and FIB raster scan lines. The principle of the FIB moire is described. Several specimen gratings with 0.14 and 0.20 micron spacing are used to generate FIB miore patterns. The FIB moire method is successfully used to measure the residual deformation in a MEMS structure after removing the SiO₂ sacrificial layer with a 5000 lines/mm grating. The results demonstrate the feasibility of this method.

Citation Download Citation

Huimin Xie, Biao Li, Robert E. Geer, Bai Xu, James Castracane, and Fulong Dai "Micro-deformation measurement using focused ion beam moire method", Proc. SPIE 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002, (29 April 2003); https://doi.org/10.1117/12.509789

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