Circular RF MEMS resonator solutions for 100- to 10-nm SOI structures

Sami K Myllymaki; E. Ristolainen; P. Heino; A. Lehto; K. Varjonen

doi:10.1117/12.499329

24 April 2003 Circular RF MEMS resonator solutions for 100-nm to 10-nm SOI structures

Sami K Myllymaki, E. Ristolainen, P. Heino, A. Lehto, K. Varjonen

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.499329
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

A new type of resonator structure has been developed in thin film SOI applications. The resonator has circular shape and vertical vibration. By using conventional SOI chips with other electronics it is possible to add this resonator in same structure without complex process steps. The resonator is low mass resonator. It can be used in low frequencies (MHz) and high frequencies (GHz). The resonator has two electrostatically driven electrodes, one directly in resonator and another in substrate. Coupling rods are not needed. Also it is possible to build some kind of transistor on the resonator. By using this component, the transistor can be driven electrostatically. It can have higher voltage-current amplification- ratio rather than conventional transistor because of mechanical impact. Both structures will at least have Q-value of 700, which has been measured in 3,3MHz in normal room conditions.

Citation Download Citation

Sami K Myllymaki, E. Ristolainen, P. Heino, A. Lehto, and K. Varjonen "Circular RF MEMS resonator solutions for 100-nm to 10-nm SOI structures", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.499329

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