Microfluid pump in brass with a built-in magnetic driver

Raghied M. Atta

doi:10.1117/12.499048

24 April 2003 Micro-fluid pump in brass with a built-in magnetic driver

Raghied M. Atta

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.499048
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

A simple valveless micropimp is fabricated using optical lithography and copper electroplating. The micropump is activated by magnetic force produced by two opposite spiral flat coils. Each coil consists of 30 tracks with 6mm diameter and 320m2 cross section. The micropump is fabricated between the two flat coils. By applying a square wave signal to the coils, they generate an alternative magnetic field, which contracts and expands the pumping chamber repeatedly causing the liquid in the pump to flow. Increasing the activating frequency, up to 300Hz, appears to increase the flow rate. Increasing the applied current, which is limited to the cross-section of the coil tracks, will increase the magnetic force and hence improve the pumping rate.

Citation Download Citation

Raghied M. Atta "Micro-fluid pump in brass with a built-in magnetic driver", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.499048

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