Monolithic III-V and hybrid polysilicon-III-V microelectromechanical tunable multilayer filters and vertical-cavity surface-emitting lasers

Edward M Ochoa; James A Lott; Thomas R. Nelson Jr.; M. C. Harvey; J. A. Raley; Andreas Stintz; Kevin J Malloy

doi:10.1117/12.499674

24 April 2003 Monolithic III-V and hybrid polysilicon-III-V microelectromechanical tunable vertical-cavity surface-emitting lasers

Edward M Ochoa, James A Lott, Thomas R. Nelson Jr., M. C. Harvey, J. A. Raley, Andreas Stintz, Kevin J Malloy

Author Affiliations +

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.499674
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

We report our progress on the design and fabrication of electrostatically-actuated microelectromechanical (MEM) tunable wavelength filters and vertical cavity surface-emitting lasers (VCSELs). We investigate both an all-semiconductor monolithic approach and a hybrid approach based on the combination of conventional polysilicon microelectromechanical systems (MEMS) and III-V semiconductor thin-film distributed Bragg reflector (DBR) and VCSEL structures. In the tunable hybrid structures the III-V semiconductor layers are flip-bonded onto specially designed polysilicon foundry MEMS structures and separated from their lattice-matched parent substrates by a novel post-bonding lift-off process.

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Edward M Ochoa, James A Lott, Thomas R. Nelson Jr., M. C. Harvey, J. A. Raley, Andreas Stintz, and Kevin J Malloy "Monolithic III-V and hybrid polysilicon-III-V microelectromechanical tunable vertical-cavity surface-emitting lasers", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.499674

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