Sigma-delta microsystems for readout and servo control

Nicolas Delorme; Cyril Condemine; Daniel Barbier

doi:10.1117/12.498787

24 April 2003 Sigma-delta microsystems for readout and servo control

Nicolas Delorme, Cyril Condemine, Daniel Barbier

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.498787
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

Several microsystem realizations are presented in this paper, which embed MEMs within a sigma-delta analog to digital (A/D) converter. A first category performs the readout and A/D conversion of capacitive sensors, while a second category, in addition to the readout and A/D conversion, provides advanced control techniques such as Proportional-Integral (PI) or Proportional-Integral-Derivative (PID) servo control to improve linearity and stability. A design methodology for this latter category is presented. For the readout-only microsystems category, the examples of pressure and acceleration readout are presented with SOI-based micromachined MEMs. Worst-case A/D conversion resolutions of 12 bits on 100Hz bandwidths are reported, with typical power consumptions for the A/D parts of around 500 μWatts. The pressure sensor microsystem includes full on-chip digital filtering and an RF powering and data transmission module for implanted applications. For the readout and servo control category, a porous silicon needle integrating a heating resistor and thermopiles is used to perform thermal conductivity measurements. Average A/D conversion resolution of 13 bits for 100Hz bandwidth is obtained and worst-case temperature regulation accuracy is 0.08 °C. Power consumption of the circuit remains around 500 μWatts. Detailed measurement results underline the valididy of the considered approaches for the implementation of high-compactness, high-resolution, improved-stability and low-power microsystems.

Citation Download Citation

Nicolas Delorme, Cyril Condemine, and Daniel Barbier "Sigma-delta microsystems for readout and servo control", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.498787

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