Systematic design methodology of bistable compliant micromechanisms

Jinni Tsay; Cheng-Kuo Sung; Liang-Qing Su

doi:10.1117/12.498874

24 April 2003 Systematic design methodology of bistable compliant micro-mechanisms

Jinni Tsay, Cheng-Kuo Sung, Liang-Qing Su

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.498874
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

A bistable compliant micro-mechanism possesses the distinguish characteristics of both the bistable mechanism and the compliant one. It can be suitably employed in various MEMS devices, such as a micro-relay, an impact sensor, etc. Currently, preventing fracture and enhancing reliability are the most important issues in the application of bistable compliant micro-mechanisms. Through a systematic design methodology, including tuning the parameters of geometric shapes, adding a stopper at the proper position, etc., one can obtain a more appropriate micro-mechanism for designated applications. This paper proposes a systematic methodology for the design of bistable compliant micro-mechanisms.

Citation Download Citation

Jinni Tsay, Cheng-Kuo Sung, and Liang-Qing Su "Systematic design methodology of bistable compliant micro-mechanisms", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.498874

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