Two-dimensional nanoscale patterning of fused silica, polyimide, and diamond films by interferential pulsed laser modification

Yu. K. Verevkin; N. G. Bronnikova; V. V. Korolikhin; Yu. Yu. Guschina; V. N. Petryakov; D. O. Filatov; N. M. Bityurin

doi:10.1117/12.518223

26 September 2003 Two-dimensional nanoscale patterning of fused silica, polyimide, and diamond films by interferential pulsed laser modification

Yu. K. Verevkin, N. G. Bronnikova, V. V. Korolikhin, Yu. Yu. Guschina, V. N. Petryakov, D. O. Filatov, N. M. Bityurin

Author Affiliations +

Proceedings Volume 5134, Current Research on Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002; (2003) https://doi.org/10.1117/12.518223
Event: Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002, 2000, Unknown, United States

Abstract

Formation of the nanoperiodic structures in polycrystalline synthetic diamond films and in polyimide films on the fused silica substrates under nanosecond pulses of UV radiation from a three-cascade XeCl laser with the emission wavelength 308 nm was investigated. The possibility of creation the peridical structures on diamond surface by interferential pulsed laser sublimation has been demonstrated. Two different mechanism of modification of the polyimide films depending on the exposure were observed. At the exposures up to 100 mJ/cm² humps occurred on the surface, at the exposures more than 100 mJ/cm² the holes appear in the film. The periodical structures on fused silica surface were obtained using UV photoresist exposed by interferential pulsed laser irradiation and Ar ion etching.

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Yu. K. Verevkin, N. G. Bronnikova, V. V. Korolikhin, Yu. Yu. Guschina, V. N. Petryakov, D. O. Filatov, and N. M. Bityurin "Two-dimensional nanoscale patterning of fused silica, polyimide, and diamond films by interferential pulsed laser modification", Proc. SPIE 5134, Current Research on Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002, (26 September 2003); https://doi.org/10.1117/12.518223

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