Thick silver coating deposited by DC magnetron sputtering

Pham Hong Tuan; Dang Xuan Cu

doi:10.1117/12.512891

25 February 2004 Thick silver coating deposited by DC magnetron sputtering

Pham Hong Tuan, Dang Xuan Cu

Proceedings Volume 5250, Advances in Optical Thin Films; (2004) https://doi.org/10.1117/12.512891
Event: Optical Systems Design, 2003, St. Etienne, France

Abstract

Due to high conductivity, silver coating is often used as high reflectivity mirror in optical and in microwave spectrum area. The thickness of silver film in optical application is usually less than the one used in microwave range. Thin silver coating has been successfully deposited by thermal evaporation. Meanwhile thick silver film of tens micrometer is often made by electrochemical process. DC magnetron is well known as good method for depositing metallic coating. Here we present an attempt to apply DC magnetron sputtering for depositing thick silver mirror. Results show that coating made by this method meet well the requirements in microwave range.

Citation Download Citation

Pham Hong Tuan and Dang Xuan Cu "Thick silver coating deposited by DC magnetron sputtering", Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); https://doi.org/10.1117/12.512891

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