Spectral ellipsometry of binary optic gratings

Jaromir Pistora; Tomuo Yamaguchi; Jaroslav Vlcek; Jan Mistrik; Masahiro Horie; Vasilij Smatko; Eva Kovacova; Kamil Postava; Mitsuru Aoyama

doi:10.1117/12.545175

21 November 2003 Spectral ellipsometry of binary optic gratings

Jaromir Pistora, Tomuo Yamaguchi, Jaroslav Vlcek, Jan Mistrik, Masahiro Horie, Vasilij Smatko, Eva Kovacova, Kamil Postava, Mitsuru Aoyama

Author Affiliations +

Proceedings Volume 5259, 13th Polish-Czech-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics; (2003) https://doi.org/10.1117/12.545175
Event: 13th Polish-Czech-Slovak Conference on Wave and Quantum Aspects of contemporary Optics, 2002, Krzyzowa, Poland

Abstract

The coupled wave method (CWM) has been applied to the description of electromagnetic wave propagation in binary optic gratings. The electromagnetic field and the permittivity profile are expanded into two-fold Fourier series. The reflection coefficients of 2D periodical structures have been specified and the ellipsometric angles of discussed shapes have been computed. The theoretical results computed for SiO₂ and Si₃N₄ dots are compared with experimental data obtained for the square silicon nitride dots on the Si substrate. The measurements were performed using computer controlled four zone null ellipsometer in spectral range from 240 nm to 700 nm. The influences of Si0₂ ultrathin oxidation layer and dot thickness on spectral ellipsometric angles are also discussed.

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Jaromir Pistora, Tomuo Yamaguchi, Jaroslav Vlcek, Jan Mistrik, Masahiro Horie, Vasilij Smatko, Eva Kovacova, Kamil Postava, and Mitsuru Aoyama "Spectral ellipsometry of binary optic gratings", Proc. SPIE 5259, 13th Polish-Czech-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics, (21 November 2003); https://doi.org/10.1117/12.545175

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