Paper
25 March 2004 Fabrication of photonic devices using novel laser-assisted methods
Michael J. Withford, Andrew J. Lee, Benjamin F. Johnston, Martin Ams, Judith M. Dawes, James A. Piper
Author Affiliations +
Proceedings Volume 5277, Photonics: Design, Technology, and Packaging; (2004) https://doi.org/10.1117/12.524399
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia
Abstract
Fabrication processes such as laser micromachining and laser based photolithography are well established within the automotive, electronics and aeronautic industries, however, except in a handful of cases, laser based micro-processing is infrequently used in the fabrication of photonic devices. In this paper novel laser assisted methods for rapid prototyping of photonic devices such as periodically poled lithium niobate and 2-D photonic crystal structures are reviewed.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael J. Withford, Andrew J. Lee, Benjamin F. Johnston, Martin Ams, Judith M. Dawes, and James A. Piper "Fabrication of photonic devices using novel laser-assisted methods", Proc. SPIE 5277, Photonics: Design, Technology, and Packaging, (25 March 2004); https://doi.org/10.1117/12.524399
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KEYWORDS
Photonic devices

Electronics

Laser processing

Lithium niobate

Micromachining

Optical lithography

Packaging

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