Long-wavelength oxide-confined VCSEL using InGaAsN quantum wells

H. C. Lai; J. S. Pan; Alice C. F. Li; M.C. Tang; C. C. Wu; Tsin-Dong Lee; K. F. Huang

doi:10.1117/12.520474

12 May 2004 Long-wavelength oxide-confined VCSEL using InGaAsN quantum wells

H. C. Lai, J. S. Pan, Alice C. F. Li, M.C. Tang, C. C. Wu, Tsin-Dong Lee, K. F. Huang

Proceedings Volume 5280, Materials, Active Devices, and Optical Amplifiers; (2004) https://doi.org/10.1117/12.520474
Event: Asia-Pacific Optical and Wireless Communications, 2003, Wuhan, China

Abstract

Characteristics of oxide-confined vertical-cavity surface emitting laser emitting at 1289nm will be presented in this paper. The wafer is monolithically grown using InGaAsN/GaAs QWs as active layer and GaAs/AlGaAs conventional DBRs. In the structure, the laser employs 39 pairs N-GaAs/Al0.9GaAs and 23 pairs P-GaAs/Al0.9GaAs with a selectively oxide layer located at first DBR close to active region, providing the current and optical confinement. The device processing is similar to the fabrication for current 850nm oxVCSELs. Mesa etching is used to expose the Al-rich AlGaAs layer and followed by oxidation to form the current confinement. The maximum light output power is around 950uW at room temperature under CW operation with a threshold current around 6mA for 10um aperture size devices. The device can still lase at 1000C with a maximum power of 0.14mW. Slope efficiency is 0.133(W/A) and side mode suppression ratio (SMSR) is around 20dB at 10mA operation. The aging data and speed transmission experimental data will also be presented.

Citation Download Citation

H. C. Lai, J. S. Pan, Alice C. F. Li, M.C. Tang, C. C. Wu, Tsin-Dong Lee, and K. F. Huang "Long-wavelength oxide-confined VCSEL using InGaAsN quantum wells", Proc. SPIE 5280, Materials, Active Devices, and Optical Amplifiers, (12 May 2004); https://doi.org/10.1117/12.520474

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available