Single-pulse microvia drilling of resin-coated copper substrates using an enhanced peak power planar waveguide CO2 laser

Colin J Moorhouse; Francisco Villarreal; Jozef J Wendland; Howard J Baker; Denis R Hall; Duncan P. Hand

doi:10.1117/12.532310

15 July 2004 Single-pulse microvia drilling of resin-coated copper substrates using an enhanced peak power planar waveguide CO₂ laser

Colin J Moorhouse, Francisco Villarreal, Jozef J Wendland, Howard J Baker, Denis R Hall, Duncan P. Hand

Author Affiliations +

Proceedings Volume 5339, Photon Processing in Microelectronics and Photonics III; (2004) https://doi.org/10.1117/12.532310
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States

Abstract

CO₂ laser drilling of the resin coated copper (RCC) layers of laminated circuit boards has been investigated at different fluence levels. The threshold fluence for copper layer drilling is found to be 570 Jcm^-2 for 5μm and 1500 Jcm^-2 for 12μm copper thickness, using laser pulses in the 10 μs and 20 μs FWHM respectively. Undercut in the resin layer is found to primarily depend on the amount of excess energy in the pulse tail. Methods to reduce the pulse decay time have been investigated, giving smaller diameter breakthrough holes close to threshold, which should aid the control of hole drilling in RCC. High-speed videography has been used to verify the observations of post-processing analysis.

Citation Download Citation

Colin J Moorhouse, Francisco Villarreal, Jozef J Wendland, Howard J Baker, Denis R Hall, and Duncan P. Hand "Single-pulse microvia drilling of resin-coated copper substrates using an enhanced peak power planar waveguide CO₂ laser", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); https://doi.org/10.1117/12.532310

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