Silicon micro-optics for smart light control

Gleb Vdovin; Davies W. de Lima Monteiro; Ourang Akhzar-Mehr; Mikhail Y. Loktev; Serhat Sakarya; Oleg Soloviev; Pasqualina M. Sarro

doi:10.1117/12.532482

24 January 2004 Silicon micro-optics for smart light control

Gleb Vdovin, Davies W. de Lima Monteiro, Ourang Akhzar-Mehr, Mikhail Y. Loktev, Serhat Sakarya, Oleg Soloviev, Pasqualina M. Sarro

Author Affiliations +

Proceedings Volume 5348, MOEMS Display and Imaging Systems II; (2004) https://doi.org/10.1117/12.532482
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

We present an overview of the results of our recent research in the field of adaptive optical components based on silicon microtechnologies, including membrane deformable mirrors, spatial light modulators, liquid-crystal correctors, wavefront sensors, and both spherical and aspherical micro-optical components. We aim at the realization of adaptive optical systems using standard-technology solutions.

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Gleb Vdovin, Davies W. de Lima Monteiro, Ourang Akhzar-Mehr, Mikhail Y. Loktev, Serhat Sakarya, Oleg Soloviev, and Pasqualina M. Sarro "Silicon micro-optics for smart light control", Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); https://doi.org/10.1117/12.532482

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