Trends in porous silicon biomedical devices: tuning microstructure and performance trade-offs in optical biosensors

Lisa A. DeLouise; Ben L. Miller

doi:10.1117/12.527578

1 July 2004 Trends in porous silicon biomedical devices: tuning microstructure and performance trade-offs in optical biosensors

Lisa A. DeLouise, Ben L. Miller

Author Affiliations +

Proceedings Volume 5357, Optoelectronic Integration on Silicon; (2004) https://doi.org/10.1117/12.527578
Event: Integrated Optoelectronic Devices 2004, 2004, San Jose, CA, United States

Abstract

High surface area mesoporous silicon microcavities are investigated for direct detect optical biosensor applications. Device quality is reported as a function of fabrication parameters. A dilute KOH etch process is utilized to modify the intrinsic 3D microstructure to enable enhanced pore infiltration of large biomolecules. Results suggest that the KOH etch mechanism is a two step process consisting of a fast step where high surface area nanostructures are rapidly removed. This is followed by a slower step where silicon is removed from the pore channel walls. The enzyme, Glutathione-S-Transferase (50kDa), is utilized to probe pore infiltration. Results from a solid phase immobilized enzyme assay support our conclusions on the impact the KOH etch step has on modifying the porous silicon microstructure. Preliminary findings point to trade-offs that exists between optimizing microstructure with microcavity operation mode and device sensitivity.

Citation Download Citation

Lisa A. DeLouise and Ben L. Miller "Trends in porous silicon biomedical devices: tuning microstructure and performance trade-offs in optical biosensors", Proc. SPIE 5357, Optoelectronic Integration on Silicon, (1 July 2004); https://doi.org/10.1117/12.527578

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available