A Computer-Controlled Experimental FIB System

T. Kato; K. Saitoh; Y. Watakabe

doi:10.1117/12.947495

20 June 1985 A Computer-Controlled Experimental FIB System

T. Kato, K. Saitoh, Y. Watakabe

Proceedings Volume 0537, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV; (1985) https://doi.org/10.1117/12.947495
Event: 1985 Microlithography Conferences, 1985, Santa Clara, United States

Abstract

A focused-ion-beam writing system for experimental use will be described. This system was designed to be simple and to be flexible enough for doing experiments. The system configuration, ion sources, and some considerations regarding alignment signals will be mentioned.

Citation Download Citation

T. Kato, K. Saitoh, and Y. Watakabe "A Computer-Controlled Experimental FIB System", Proc. SPIE 0537, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV, (20 June 1985); https://doi.org/10.1117/12.947495

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