Characterization of new ultrathick chemically amplified positive-tone photoresists suitable for electroplating application

Anja Voigt; Marina Heinrich; Gabi Gruetzner

doi:10.1117/12.535205

14 May 2004 Characterization of new ultrathick chemically amplified positive-tone photoresists suitable for electroplating application

Anja Voigt, Marina Heinrich, Gabi Gruetzner

Author Affiliations +

Proceedings Volume 5376, Advances in Resist Technology and Processing XXI; (2004) https://doi.org/10.1117/12.535205
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

There is an increasing need for highly viscous and easy to process thick and ultra thick photoresists for the production of Micro-Electro-Mechanical-Systems (MEMS) and advanced packaging. Here we present results with some novel positive tone photoresists formulated for this purpose. For that we transfered the concept of chemically amplified resists (CARs), originally designed to meet the IC-industry demands for miniaturization and higher resolution, to highly viscous resists. Various polymeric materials have been tested regarding their use in thick CARs. Appropriate resist formulations were developed and their lithographic performance was investigated in a thickness range of 50-150 microns. The CARs are sensitive to UV400.

Citation Download Citation

Anja Voigt, Marina Heinrich, and Gabi Gruetzner "Characterization of new ultrathick chemically amplified positive-tone photoresists suitable for electroplating application", Proc. SPIE 5376, Advances in Resist Technology and Processing XXI, (14 May 2004); https://doi.org/10.1117/12.535205

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available