Equivalence between the software-determined and the hardware-determined effective numerical aperture in the interferometrical measuring of microlens

Masahiko Kato; Takaaki Miyashita; Kenjiro Hamanaka; Satoshi Ishihara D.V.M.; Eiichi Sato; Tadashi Morokuma

doi:10.1117/12.559837

2 August 2004 Equivalence between the software-determined and the hardware-determined effective numerical aperture in the interferometrical measuring of microlens

Masahiko Kato, Takaaki Miyashita, Kenjiro Hamanaka, Satoshi Ishihara D.V.M., Eiichi Sato, Tadashi Morokuma

Author Affiliations +

Proceedings Volume 5532, Interferometry XII: Applications; (2004) https://doi.org/10.1117/12.559837
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

We describe here characteristic properties relating to the interferometrical measuring of microlens with an effective numerical aperture determined by the software or the hardware. Starting from the wave equation, both of the amplitude and the phase of propagating optical beams can be calculated using Hankel transformation anywhere through the interferometer. First introducing the effective aperture determined by the hardware including the method of projecting the effective aperture on the pupil of the microlens, the effect of truncation or diffraction with the effective aperture on the beam propagation is shown. Next using Mach-Zehnder interferometer combined with the effective aperture, the measurement of the wavefront aberration of test microlens is simulated to show that the imaginary aperture by the software settled on the image sensor which is located at the conjugate position of the test microlens is equivalent to the hardware determined effective aperture including projected one. Numerical results are presented to show the measurement errors stay within λ/100 for two typical test microlens of 38 μmΦ and 125 μmΦ with 1 λ wavefront aberration for aberration-free measuring optics with large enough numerical aperture.

Citation Download Citation

Masahiko Kato, Takaaki Miyashita, Kenjiro Hamanaka, Satoshi Ishihara D.V.M., Eiichi Sato, and Tadashi Morokuma "Equivalence between the software-determined and the hardware-determined effective numerical aperture in the interferometrical measuring of microlens", Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); https://doi.org/10.1117/12.559837

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available