Fabrication-limited design of a reconfigurable PBG MEMS waveguide device

David M. Mackie; Weimin Zhou; Monica Taysing-Lara; Gerard Dang

doi:10.1117/12.571430

19 January 2005 Fabrication-limited design of a reconfigurable PBG MEMS waveguide device

David M. Mackie, Weimin Zhou, Monica Taysing-Lara, Gerard Dang

Proceedings Volume 5592, Nanofabrication: Technologies, Devices, and Applications; (2005) https://doi.org/10.1117/12.571430
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

We report on our design and fabrication of a semiconductor based photonic bandgap nano-membrane device with MEMS features. This device could be used as a basic building block for a reconfigurable optoelectronic integrated circuit that can be reprogrammed for many different functionalities.

Citation Download Citation

David M. Mackie, Weimin Zhou, Monica Taysing-Lara, and Gerard Dang "Fabrication-limited design of a reconfigurable PBG MEMS waveguide device", Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); https://doi.org/10.1117/12.571430

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