Synchrotron Based Measurements Of The Soft X-Rayperformance Of Thin Film Multilayer Structures

D. R . Kania; R. J. Bartlett; W. J. Trela

doi:10.1117/12.949670

6 May 1985 Synchrotron Based Measurements Of The Soft X-Rayperformance Of Thin Film Multilayer Structures

D. R . Kania, R. J. Bartlett, W. J. Trela

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949670
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

There is a great interest in the application of thin film multilayer structures for xÃ¢â‚¬â€?ray optical elements. We have developed aparatus and techniques to measure the reflectivity of multilayer structures on flat substrates a function of energy at angles from grazing to near normal incidence using a synchrotron. We will present descriptions of our measurement techniques and aparatus along with a comparison between theoretical calculations and experimental data.

Citation Download Citation

D. R . Kania, R. J. Bartlett, and W. J. Trela "Synchrotron Based Measurements Of The Soft X-Rayperformance Of Thin Film Multilayer Structures", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949670

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