Effects of high moisture on the purification of clean compressed air

Min Guo; Joseph P. Rotter; Allan H. Tram; Russell J. Holmes; Daniel J. Alvarez Jr.

doi:10.1117/12.580509

27 January 2005 Effects of high moisture on the purification of clean compressed air

Min Guo, Joseph P. Rotter, Allan H. Tram, Russell J. Holmes, Daniel J. Alvarez Jr.

Proceedings Volume 5645, Advanced Microlithography Technologies; (2005) https://doi.org/10.1117/12.580509
Event: Photonics Asia, 2004, Beijing, China

Abstract

A method was developed to measure hydrocarbons to 1 part-per-trillion (ppt) concentration levels with a gas chromatograph and flame ionization detector (GC/FID). This method was used to measure purifier siloxane removal efficiencies from air under dry and humid conditions. Several media types were examined: activated carbon (AC), bead-shaped activated carbon (BAC) and a proprietary inorganic material (PIM). Under dry conditions, all three materials removed the siloxane challenge to below 1ppt. The AC material had a removal efficiency of 286 ppt under humid conditions. The BAC and PIM removed the siloxane challenge to below 1 ppt under humid conditions. After media saturation was reached under humid conditions, the materials were regenerated and siloxane removal efficiencies were re-examined. Only the PIM material was regenerable to below 1ppt efficiency levels.

Citation Download Citation

Min Guo, Joseph P. Rotter, Allan H. Tram, Russell J. Holmes, and Daniel J. Alvarez Jr. "Effects of high moisture on the purification of clean compressed air", Proc. SPIE 5645, Advanced Microlithography Technologies, (27 January 2005); https://doi.org/10.1117/12.580509

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