Laser ablation of TiO2-2xNx targets for efficient N-doping into anatase TiO2 photocatalytic films

Tatsunori Sakano; Takeshi Okato; Minoru Obara

doi:10.1117/12.591362

12 April 2005 Laser ablation of TiO_2-2xN_x targets for efficient N-doping into anatase TiO₂ photocatalytic films

Tatsunori Sakano, Takeshi Okato, Minoru Obara

Proceedings Volume 5713, Photon Processing in Microelectronics and Photonics IV; (2005) https://doi.org/10.1117/12.591362
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

Among the well-known photo-catalytic materials, the anatase TiO₂ is the most promising in terms of its chemical stability and high reactivity. It is known that the photo-catalytic activity under the visible light irradiation can be enhanced by nitrogen doping into the anatase, because the substitutional nitrogen produces an impurity state which absorbs the visible light. In this paper, we will report on the properties of the nitrogen doped films with different dopant concentrations. The anatase films are prepared by KrF excimer pulsed-laser ablation of TiO_2-xN_x targets. The films are deposited on the (100) LaAlO₃ substrate which has a good lattice matching with anatase (~ 0.2%). First, we discuss the optimization of the growth conditions. To prepare the nitrogen doped anatase thin films, we have developed a low-temperature epitaxy. The growth of anatase-type TiO₂ was confirmed using an x-ray diffraction (XRD). The nitrogen incorporation was evaluated by an x-ray photoemission spectroscopy (XPS). The as-grown films have very smooth surface and exhibit good amphiphilic properties. Then, we present the photo-catalytic activity of the films. The nitrogen doping concentration was varied by adjusting the amount of nitrogen in the ablation targets. The photo-catalytic activity was measured by the decomposition rate of methylene blue solution under a fluorescent light illumination.

Citation Download Citation

Tatsunori Sakano, Takeshi Okato, and Minoru Obara "Laser ablation of TiO_2-2xN_x targets for efficient N-doping into anatase TiO₂ photocatalytic films", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); https://doi.org/10.1117/12.591362

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KEYWORDS

Nitrogen

Crystals

Doping

Visible radiation

Laser ablation

Particles

Epitaxy

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