Fabrication of three-dimensional photonic devices using femtosecond laser pulses

Ik-Bu Sohn; Man-Seop Lee; Sang-Man Lee; Jung-Sik Woo; Jung-Yong Jung

doi:10.1117/12.588501

22 January 2005 Fabrication of three-dimensional photonic devices using femtosecond laser pulses

Ik-Bu Sohn, Man-Seop Lee, Sang-Man Lee, Jung-Sik Woo, Jung-Yong Jung

Proceedings Volume 5715, Micromachining and Microfabrication Process Technology X; (2005) https://doi.org/10.1117/12.588501
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Using tightly focused femtosecond laser pulses, we produced optical waveguide and devices in the transparent materials. This technique has the potential to generate not only channel waveguide but three-dimensional optical devices. In this paper, an optical splitter and U-grooves, which are used for fiber alignment, are simultaneously fabricated in a fused silica glass by using near-IR femtosecond laser pulses. The fiber aligned optical splitter has a low insertion loss, less than 4 dB, including intrinsic splitting loss of 3 dB and excess loss due to the passive alignment of a single-mode fiber. Finally, the utility of the femtosecond laser writing technique is demonstrated by fabricating gratings at the surface and inside the silica glass, respectively.

Citation Download Citation

Ik-Bu Sohn, Man-Seop Lee, Sang-Man Lee, Jung-Sik Woo, and Jung-Yong Jung "Fabrication of three-dimensional photonic devices using femtosecond laser pulses", Proc. SPIE 5715, Micromachining and Microfabrication Process Technology X, (22 January 2005); https://doi.org/10.1117/12.588501

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available