Damage of MEMS thermal actuators heated by laser irradiation

Leslie M. Phinney; Kelly A. Klody; John T. Sackos; Jeremy A. Walraven

doi:10.1117/12.594408

22 January 2005 Damage of MEMS thermal actuators heated by laser irradiation

Leslie M. Phinney, Kelly A. Klody, John T. Sackos, Jeremy A. Walraven

Proceedings Volume 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV; (2005) https://doi.org/10.1117/12.594408
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Optical actuation of microelectromechanical systems (MEMS) is advantageous for applications for which electrical isolation is desired. Thirty-two polycrystalline silicon opto-thermal actuators, optically-powered MEMS thermal actuators, were designed, fabricated, and tested. The design of the opto-thermal actuators consists of a target for laser illumination suspended between angled legs that expand when heated, providing the displacement and force output. While the amount of displacement observed for the opto-thermal actuators was fairly uniform for the actuators, the amount of damage resulting from the laser heating ranged from essentially no damage to significant amounts of damage on the target. The likelihood of damage depended on the target design with two of the four target designs being more susceptible to damage. Failure analysis of damaged targets revealed the extent and depth of the damage.

Citation Download Citation

Leslie M. Phinney, Kelly A. Klody, John T. Sackos, and Jeremy A. Walraven "Damage of MEMS thermal actuators heated by laser irradiation", Proc. SPIE 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV, (22 January 2005); https://doi.org/10.1117/12.594408

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