Microfabrication of an integrated SU-8 waveguide with an embedded focusing lens for application in single-molecule detection (SMD)

Ren Yang; Steven A. Soper; Wanjun Wang

doi:10.1117/12.591956

22 January 2005 Microfabrication of an integrated SU-8 waveguide with an embedded focusing lens for application in single-molecule detection (SMD)

Ren Yang, Steven A. Soper, Wanjun Wang

Author Affiliations +

Proceedings Volume 5718, Microfluidics, BioMEMS, and Medical Microsystems III; (2005) https://doi.org/10.1117/12.591956
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

This paper reports a research effort to design, microfabricate, and test a uniquely designed waveguide technology with integrated micro-lenses in vertical orientations. The waveguide and integrated focusing lenses were microfabricated using thick photo-resist such as SU-8 with UV-light lithography. The waveguide can be used in various biological and biomedical systems.

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Ren Yang, Steven A. Soper, and Wanjun Wang "Microfabrication of an integrated SU-8 waveguide with an embedded focusing lens for application in single-molecule detection (SMD)", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); https://doi.org/10.1117/12.591956

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