Approximation of three dimensional mask effects with two dimensional features

Min Bai; Lawrence S. Melvin III; Qiliang Yan; James P. Shiely; Bradley J. Falch; Chong-Cheng Fu; Ruoping Wang

doi:10.1117/12.600547

6 May 2005 Approximation of three dimensional mask effects with two dimensional features

Min Bai, Lawrence S. Melvin III, Qiliang Yan, James P. Shiely, Bradley J. Falch, Chong-Cheng Fu, Ruoping Wang

Proceedings Volume 5751, Emerging Lithographic Technologies IX; (2005) https://doi.org/10.1117/12.600547
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

As an important resolution enhancement technique (RET), alternating aperture phase shift masks (AAPSM) has been widely adopted in 90 nm technology node and beyond. Mask topographical effect due to the 3D nature of the shifter features is becoming an increasingly important factor in lithography modeling. Rigorous 3D modeling of PSM is very computationally demanding thus impractical for full chip optical proximity correction (OPC). Here we introduce an alternative approach employing boundary layers to effectively approximate the 3D mask effect. We will present the model calibration versus real wafer data using the boundary layers and the corresponding OPC correction flow.

Citation Download Citation

Min Bai, Lawrence S. Melvin III, Qiliang Yan, James P. Shiely, Bradley J. Falch, Chong-Cheng Fu, and Ruoping Wang "Approximation of three dimensional mask effects with two dimensional features", Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); https://doi.org/10.1117/12.600547

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available