The nanostructured Origami 3D fabrication and assembly process for nanopatterned 3D structures

Hyun Jin In; William J. Arora; Paul Stellman; Sundeep Kumar; Shao-Horn Yang; Henry I. Smith; George Barbastathis

doi:10.1117/12.600304

16 May 2005 The nanostructured Origami 3D fabrication and assembly process for nanopatterned 3D structures

Hyun Jin In, William J. Arora, Paul Stellman, Sundeep Kumar, Shao-Horn Yang, Henry I. Smith, George Barbastathis

Proceedings Volume 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2005) https://doi.org/10.1117/12.600304
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

Nanostructured Origami 3D Fabrication and Assembly Process is a method of manufacturing 3D nanostructured devices using exclusively 2D micro- and nanofabrication techniques. The origami approach consists of first patterning a large 2D membrane and then folding the membrane along predefined regions to obtain the final 3D configuration. We report on the materials, actuation, and modeling aspects of building an origami structure. Experimental results from fabricated devices as well as future applications of the technique are also presented.

Citation Download Citation

Hyun Jin In, William J. Arora, Paul Stellman, Sundeep Kumar, Shao-Horn Yang, Henry I. Smith, and George Barbastathis "The nanostructured Origami 3D fabrication and assembly process for nanopatterned 3D structures", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.600304

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