Structure and ferroelectric properties of Bi3.25La0.75Ti3O12 and Bi3.25Nd0.75Ti3O12 thin films prepared by an MOD method

Jian Hua Ma; Xiang-Jian Meng; Jing-Lan Sun; Tie Lin; Jun-Hao Chu

doi:10.1117/12.607334

8 December 2004 Structure and ferroelectric properties of Bi_3.25La_0.75Ti₃O₁₂ and Bi_3.25Nd_0.75Ti₃O₁₂ thin films prepared by an MOD method

Jian Hua Ma, Xiang-Jian Meng, Jing-Lan Sun, Tie Lin, Jun-Hao Chu

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Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607334
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

The structure and ferroelectric properties of Bi_3.25La _0.75Ti₃O₁₂ (BLT) and Bi_3.25Nd_0.75Ti₃O₁₂ (BNT) thin films deposited on (111)Pt/Ti/SiO₂/Si substrates using a metalorganic decomposition (MOD) method were investigated. Both the films were polycrystalline structure with the single bismuth-layered phase. The BNT film showed the (117) random orientation, while the BLT film displayed (00l)-preferential orientation. The BNT film showed a larger remnant polarization (~13.8μC/cm²) than the BLT film (~3.5μC/cm²), while both films displayed almost the same value of coercive field. The BNT film had the larger dielectric constant and a litter larger dissipation factor than the BLT film. The superior ferroelectricity of the BNT film was mainly attributed to its (117) random orientation. Furthermore, the BNT film displayed good fatigue endurance up to 10⁹ switching cycles, indicating it was a useful candidate for integrated device applications.

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Jian Hua Ma, Xiang-Jian Meng, Jing-Lan Sun, Tie Lin, and Jun-Hao Chu "Structure and ferroelectric properties of Bi_3.25La_0.75Ti₃O₁₂ and Bi_3.25Nd_0.75Ti₃O₁₂ thin films prepared by an MOD method", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607334

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