Resolution enhancement technologies in optical metrology

Wolfgang Osten; Norbert Kerwien

doi:10.1117/12.611594

14 February 2005 Resolution enhancement technologies in optical metrology

Wolfgang Osten, Norbert Kerwien

Proceedings Volume 5776, Eighth International Symposium on Laser Metrology; (2005) https://doi.org/10.1117/12.611594
Event: Eighth International Conference on Laser Metrology, 2005, Merida, Mexico

Abstract

In history any field of activity shows periods that are characterized by evolutionary, revolutionary and stagnating moments, respectively. Especially in optics the 17th, 19th, and 20th century can be considered as revolutionary periods that changed our insight dramatically. However, the often observed opinion that a discipline is already completed was always revised by new facts that broadened our knowledge about the certain field. For instance, in modern optics the discovery of the wave front reconstruction principle (holography) and the implementation of the light amplification by stimulated emission in the laser pushed the further development of the field in an outstanding way. Nevertheless, a lot of questions are looking for an answer. Particularly, in order to justify its role as an enabling technology for most of the key technologies optics has to follow strictly the enormous requirements in spatial resolution, robustness, reliability and traceability. Since it is far beyond the claim of this contribution to address all these problems we concentrate our view on modern approaches of resolution enhancement only.

Citation Download Citation

Wolfgang Osten and Norbert Kerwien "Resolution enhancement technologies in optical metrology", Proc. SPIE 5776, Eighth International Symposium on Laser Metrology, (14 February 2005); https://doi.org/10.1117/12.611594

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available