Paper
19 May 2005 MEMS-based electrostatically tunable microstrip patch antenna using flexible polyimide film
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Abstract
This paper reports a MEMS-based electrostatically tunable microstrip patch antenna fabricated using printed circuit processing techniques. The microstrip patch is patterned on the top side of the flexible kapton polyimide film, which is suspended above the fixed ground plane using a spacer. The air gap between the microstrip patch and the ground plane is decreased by applying a DC bias voltage between the patch and the ground plane. A decrease in air gap increases the effective permittivity of the antenna resulting in a downward shift in the resonant frequency. The microstrip patch is excited by a slot in the ground plane, which is inductively coupled by a coplanar waveguide (CPW) feed line. A 6 mm x 6 mm microstrip patch antenna tunable from 18.34 GHz at 0 V to 17.95 GHz at 268 V (with a tuning range of 390 MHz) is discussed.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Raghav Venkat Goteti and Ramesh Ramadoss "MEMS-based electrostatically tunable microstrip patch antenna using flexible polyimide film", Proc. SPIE 5798, Spaceborne Sensors II, (19 May 2005); https://doi.org/10.1117/12.606645
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Cited by 2 scholarly publications.
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KEYWORDS
Antennas

Electromechanical design

Copper

3D modeling

Optical alignment

3D metrology

Fabrication

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