Perspectives of development of monolithic IR cooled focal plane arrays for composite multispectrum systems of detection in wavelength range from 1.5-5.0 to 8.0-12.0 microns

V. A. Arutyunov; I. S. Vasilyev; V. G. Ivanov; A. E. Procofyev; R. M. Stepanov

doi:10.1117/12.628668

7 June 2005 Perspectives of development of monolithic IR cooled focal plane arrays for composite multispectrum systems of detection in wavelength range from 1.5-5.0 to 8.0-12.0 microns

V. A. Arutyunov, I. S. Vasilyev, V. G. Ivanov, A. E. Procofyev, R. M. Stepanov

Author Affiliations +

Proceedings Volume 5834, 18th International Conference on Photoelectronics and Night Vision Devices; (2005) https://doi.org/10.1117/12.628668
Event: 18th International Conference on Photoelectronics and Night Vision Devices and Quantum Informatics 2004, 2004, Moscow, Russian Federation

Abstract

Current state of development of silicon cooled array JR detectors (FPA) with photosensitive elements on Shottky barrier (SB) and imagers based on them completed lately at NRI "E1ectron" is under consideration. The most important parameters of widespectrum monolithic FPA with 256x 256 elements on PtSi (1.2-5.5 μm) and IrSi (1.2-10.5 μm) and also FPA with 512x512 elements on PtSi are presented. The results of laboratory and field tests of JR cameras with use of developed SB FPA demonstrated correctness of the chosen direction of work allowed to get experience in SB FPA exploitation and found out the ways of their perfection in application to work with small size objects. The factors limiting further improvement of threshold sensitivity of developed SB FPA at work on small details of image were examined. The specific requirements to SB FPA operating in multispectrum JR systems for small size object detection are discussed. It is noted that the development of the large format SB FPA with improved sensitivity in monolithic version based on Si using modern VLSJC technology and new technology of manufacture and treatment of multilayer thin film structures of metal and semiconductor silicides are perspective.

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V. A. Arutyunov, I. S. Vasilyev, V. G. Ivanov, A. E. Procofyev, and R. M. Stepanov "Perspectives of development of monolithic IR cooled focal plane arrays for composite multispectrum systems of detection in wavelength range from 1.5-5.0 to 8.0-12.0 microns", Proc. SPIE 5834, 18th International Conference on Photoelectronics and Night Vision Devices, (7 June 2005); https://doi.org/10.1117/12.628668

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