Two-photon photopolymerization for photonic, mechanical and meta-material devices

Satoshi Kawata

doi:10.1117/12.621793

27 August 2005 Two-photon photopolymerization for photonic, mechanical and meta-material devices

Satoshi Kawata

Proceedings Volume 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II; 59310S (2005) https://doi.org/10.1117/12.621793
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Two-photon photopolymerization has been recently considered one of the most important micro-nanofabrication technologies. Different from general precision manufacturing approaches, the two-photon method has intrinsic three-dimensional (3D) processing capability with a reasonable spatial resolution around 100 nm. It is potentially a technical route to fabricate 3D multifunctional devices and their spatial integrating system. Here we introduce its use in fabrication of micro-nanophotonic, mechanical and meta-material structures [1-20].

Citation Download Citation

Satoshi Kawata "Two-photon photopolymerization for photonic, mechanical and meta-material devices", Proc. SPIE 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II, 59310S (27 August 2005); https://doi.org/10.1117/12.621793

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