Generic vibration criteria for nanotechnology experiments

A. Michael Fraumeni; Peter Heiland; Neil Judell

doi:10.1117/12.619404

29 August 2005 Generic vibration criteria for nanotechnology experiments

A. Michael Fraumeni, Peter Heiland, Neil Judell

Proceedings Volume 5933, Buildings for Nanoscale Research and Beyond; 59330T (2005) https://doi.org/10.1117/12.619404
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Generic vibration and noise criteria (VC & NC) exist for semiconductor facility design purposes. This paper proposes to extend the criteria for use in nanotechnology facilities considering the higher level of sensitivity of new equipment without manufacturer's vibration criteria. Specifications are derived for air-borne and structure-borne excitation. The new criteria are referred to as 'VC-NT and NC-NT' curves and proposed to be used for the design of new laboratories and nanotechnology facilities. Three case studies are used to validate the criteria.

Citation Download Citation

A. Michael Fraumeni, Peter Heiland, and Neil Judell "Generic vibration criteria for nanotechnology experiments", Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 59330T (29 August 2005); https://doi.org/10.1117/12.619404

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