Measurement of optical thickness variation of a multiple-surface object by a wavelength tuning interferometer

Jan Burke; Kenichi Hibino; Ryohei Hanayama; Bonzenko F. Oreb

doi:10.1117/12.666830

9 December 2005 Measurement of optical thickness variation of a multiple-surface object by a wavelength tuning interferometer

Jan Burke, Kenichi Hibino, Ryohei Hanayama, Bonzenko F. Oreb

Author Affiliations +

Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 60240O (2005) https://doi.org/10.1117/12.666830
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Wavelength tuning interferometry can distinguish interference signals from different surfaces in frequency space. The optical thickness variation of each layer of a multiple-surface object was measured by a new tunable phase measuring algorithm which can efficiently compensate for the frequency detuning of the interference signals. A two-layer object consisting of Lithium Niobate (LNB) wafer on the supporting glass parallel was measured by the new tunable algorithm in a Fizeau interferometer. Experimental results show that the optical thickness variation of the top wafer was measured with an error of λPV over a 70 mm diameter aperture.

Citation Download Citation

Jan Burke, Kenichi Hibino, Ryohei Hanayama, and Bonzenko F. Oreb "Measurement of optical thickness variation of a multiple-surface object by a wavelength tuning interferometer", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60240O (9 December 2005); https://doi.org/10.1117/12.666830

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