Conception and design of a thermal valveless micropump

G. Manzoni; S. Heisig; T. Takano; C. Kocer; H. Goto; T. Mihara; R. Maeda

doi:10.1117/12.638467

19 January 2006 Conception and design of a thermal valveless micropump

G. Manzoni, S. Heisig, T. Takano, C. Kocer, H. Goto, T. Mihara, R. Maeda

Proceedings Volume 6036, BioMEMS and Nanotechnology II; 60360I (2006) https://doi.org/10.1117/12.638467
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

This paper describes the conception and design of a micropump for gas, with no moving or deformable parts, for use on the future sensor network system, which includes environment monitoring. This design is original because of the complete absence of moving parts for the pumping of gas. In fact, fluid movement was obtained by means of repetitive heating and cooling cycles of the gas, in the pump chamber. The prototyping work is on going and the first results are presented with particular emphasis on thermal characterization.

Citation Download Citation

G. Manzoni, S. Heisig, T. Takano, C. Kocer, H. Goto, T. Mihara, and R. Maeda "Conception and design of a thermal valveless micropump", Proc. SPIE 6036, BioMEMS and Nanotechnology II, 60360I (19 January 2006); https://doi.org/10.1117/12.638467

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available