Paper
21 March 2006 A novel miniaturized EDM mechanism based on linear stepping ultrasonic motor
Y. J. Tang, F. Q. Hu, Z. L. Wang, W. S. Zhao
Author Affiliations +
Proceedings Volume 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials; 604006 (2006) https://doi.org/10.1117/12.664134
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China
Abstract
In order to machine inclined micro-holes and operate in narrow space, a novel miniaturized EDM (Electro Discharge Machining) mechanism has been developed. Because of its merit of compact size (70×40×50mm), the mechanism can be fixed on robot. The prototype of miniaturized EDM system consists of electrode direct drive unit, EDM electrical parameters and servo controller, ultrasonic EDM generator, manual robot, in addition to miniaturized EDM mechanism. Differential Reciprocating Driving Method (DRDM) is presented, and the coaxial forced vibration of electrode can be achieved. Coaxial vibration is applied to promote the evacuation of debris, and it helps to achieve stable and efficient machining. The optimal design of ultrasonic motor has been implemented using Finite Element Method (FEM), and the reasonable structure has been achieved. Feeding resolution of electrode can reach 40nm in differential reciprocating style. The holes with figures of Φ85μm circle, Φ90μm inclined circle, Y and inclined Y have been machined.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Y. J. Tang, F. Q. Hu, Z. L. Wang, and W. S. Zhao "A novel miniaturized EDM mechanism based on linear stepping ultrasonic motor", Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 604006 (21 March 2006); https://doi.org/10.1117/12.664134
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KEYWORDS
Electrodes

Ultrasonics

Teeth

Finite element methods

Servomechanisms

Micromachining

Prototyping

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