The principle of differential grating displacement sensor

Xihou Chen; Donglin Peng; Xinghong Zhang; Xiaokang Liu

doi:10.1117/12.664363

20 February 2006 The principle of differential grating displacement sensor

Xihou Chen, Donglin Peng, Xinghong Zhang, Xiaokang Liu

Proceedings Volume 6041, ICMIT 2005: Information Systems and Signal Processing; 604127 (2006) https://doi.org/10.1117/12.664363
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China

Abstract

Grating type sensor is one of the most important displacement sensors. But the number and the machining precision of their gratings limit the resolution of traditional grating displacement sensor. A new sensor called differential displacement sensor is proposed for the first time. Based on the principle resembling that of vernier calipers, using the scale differential of two staves with relative motion, it can gain more impulses, and achieve the goal of improving resolution. As a new displacement sensor, differential grating displacement sensor has its own characteristic. There are some special factors should be considered and some rules should be followed in designing differential grating sensor. And the parameter choice has a great effect on the performance of the sensor. The design idea, working principle and parameter design rules of differential grating sensor are introduced in details in this paper by making gear grating sensor as an example.

Citation Download Citation

Xihou Chen, Donglin Peng, Xinghong Zhang, and Xiaokang Liu "The principle of differential grating displacement sensor", Proc. SPIE 6041, ICMIT 2005: Information Systems and Signal Processing, 604127 (20 February 2006); https://doi.org/10.1117/12.664363

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