Technology development of mold fabrication for free-form surface, DOE, and microlens

Hiroshi Owari; Shinsuke Kawai; Yukihiro Mukai; Shigekazu Terada; Takeshi Matsuo; Masafumi Seigo; Akihiro Yano; Tadaomi Imura; Daisuke Emi; Seiichiro Kitagawa

doi:10.1117/12.647162

23 January 2006 Technology development of mold fabrication for free-form surface, DOE, and microlens

Hiroshi Owari, Shinsuke Kawai, Yukihiro Mukai, Shigekazu Terada, Takeshi Matsuo, Masafumi Seigo, Akihiro Yano, Tadaomi Imura, Daisuke Emi, Seiichiro Kitagawa

Author Affiliations +

Proceedings Volume 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV; 61100T (2006) https://doi.org/10.1117/12.647162
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

This paper describes the fabrication of several diverse examples of molding tools designed for high volume production of plastic and glass optical components. The examples shown demonstrate a wide combination of surface shapes and structures all with nanometer level accuracy. The tungsten carbide molding tools were produced using grinding and magnetorheological finishing (MRF), new raster fabrication, and micro-milling. Mold tools were fabricated to produce a glass free-form surface, (profile accuracy of less than 200nm in PV, surface roughness of less than Ra5nm), a radial arrangement of 188-microlens, a microscopic pin (3um in diameter, 100um in height), and a molding tool for DOE with little optical loss. The molding of glass optics requires mold materials which can be used at high temperatures. In addition to tungsten carbide this paper describes molds fabricated from nano-structural sintered material or ceramic with partially stabilized molecular structure.

Citation Download Citation

Hiroshi Owari, Shinsuke Kawai, Yukihiro Mukai, Shigekazu Terada, Takeshi Matsuo, Masafumi Seigo, Akihiro Yano, Tadaomi Imura, Daisuke Emi, and Seiichiro Kitagawa "Technology development of mold fabrication for free-form surface, DOE, and microlens", Proc. SPIE 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV, 61100T (23 January 2006); https://doi.org/10.1117/12.647162

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