Using periodic electrical excitation to achieve stick-release in micro-cantilevers

Amit Savkar; Kevin D. Murphy

doi:10.1117/12.647841

5 January 2006 Using periodic electrical excitation to achieve stick-release in micro-cantilevers

Amit Savkar, Kevin D. Murphy

Proceedings Volume 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V; 611102 (2006) https://doi.org/10.1117/12.647841
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

Recently, it has been proposed that sticking contact between micro-scale components may be relieved (i.e., the components may be unstuck) using structural vibrations. The means to excite these vibrations plays a critical role in the physical mechanism responsible for the initiation of stick-release. For example, it has been shown that mechanical actuation using, say, an instrumented nanoindentor is most effective near a resonant frequency. Aside from showing the fundamental mechanism responsible for the repair (resonance), it also provides insight for choosing optimal excitation parameters, such as excitation amplitude and frequency, for stick-release. In the present paper, periodic electrical excitation is explored as a means of inducing structural vibrations. It is shown that electrical excitation produces stick-release through a fundamentally different mechanism than its mechanical counterpart. Here, stick-release is achieved via unstable self-excited vibrations. This fact has a significant influence on the practical matter of choosing appropriate excitation parameters to produce the desired repair. Using the underlying physics, appropriate parameter combinations are mapped.

Citation Download Citation

Amit Savkar and Kevin D. Murphy "Using periodic electrical excitation to achieve stick-release in micro-cantilevers", Proc. SPIE 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V, 611102 (5 January 2006); https://doi.org/10.1117/12.647841

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available