Scanning 2D micromirror with enhanced flatness at high frequency

Alexander Wolter; Thomas Klose; Shu-Ting Hsu; Harald Schenk; Hubert Lakner

doi:10.1117/12.654478

23 January 2006 Scanning 2D micromirror with enhanced flatness at high frequency

Alexander Wolter, Thomas Klose, Shu-Ting Hsu, Harald Schenk, Hubert Lakner

Proceedings Volume 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV; 61140L (2006) https://doi.org/10.1117/12.654478
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

We present a scanning micromirror with 5x better flatness of the mirror plate compared to our previous devices. The devices are designed for a laser scanning displays with VGA resolution. Scanning laser displays are certainly the most demanding application for scanning micromirrors. The fast axis must provide a large mirror plate that remains flat, when deflected to large angles at high frequency. The presented devices meet the specifications for VGA-resolution (640x480 pixels). Oscillation frequency is 16kHz. The mirror-plate has 1mm diameter and can be deflected by +/-10°. Dynamic deformation is below lamba/10 under these conditions. The devices are fabricated in the established SOI process of Fraunhofer IPMS Dresden. Mirror plate and springs are made of 30um of crystalline silicon. Operation is resonant with lateral out-of-plane comb-drives. In this article we present the design, simulation results and measurement results.

Citation Download Citation

Alexander Wolter, Thomas Klose, Shu-Ting Hsu, Harald Schenk, and Hubert Lakner "Scanning 2D micromirror with enhanced flatness at high frequency", Proc. SPIE 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV, 61140L (23 January 2006); https://doi.org/10.1117/12.654478

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