Fabrication of SIL array of glass by surface-tension mold technique

Tetsuo Kishi; Shuichi Shibata; Tetsuji Yano

doi:10.1117/12.647317

28 February 2006 Fabrication of SIL array of glass by surface-tension mold technique

Tetsuo Kishi, Shuichi Shibata, Tetsuji Yano

Proceedings Volume 6126, Photonics Packaging and Integration VI; 61260P (2006) https://doi.org/10.1117/12.647317
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

A preparation of microlens array of the super-spherical glasses by a combination of the photolithography and the Surface-tension Mold (StM) techniques is shown. A super-spherical lens has been gathering much attention because of its function as a Solid Immersion Lens (SIL) with the super-resolution, which circumvents the optical diffraction limit. StM technique enables the preparation of a micrometer-sized SIL (μ-SIL) with the desirable shape, and the obtained SILs realize the optical function. In order to develop the optical micro-devices composed of SILs, μ-SIL array module, the micro-fabrication technique of photolithography is combined with StM technique. Na₂O-CaO-SiO₂ glass film is attached to glassy-carbon, and etched into glass tiles after the formation of masks by the photolithography. They are heated up to 800^oC to self-organize into the super-spherical form of the glass droplets. The obtained lens array is found to be composed of the μ-SILs with the uniform radius and thickness.

Citation Download Citation

Tetsuo Kishi, Shuichi Shibata, and Tetsuji Yano "Fabrication of SIL array of glass by surface-tension mold technique", Proc. SPIE 6126, Photonics Packaging and Integration VI, 61260P (28 February 2006); https://doi.org/10.1117/12.647317

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